[推荐]2003-04MEMS领域的top20papers

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***Article 1
by Xia, YN
Total Cites: 267
Article Title: SOFT LITHOGRAPHY
Authors: Xia, YN, Whitesides, GM
Journal: ANNUAL REVIEW OF MATERIALS SCIENCE
Volume: 28
Page: 153-184
Year: 1998
Addresses:
?HARVARD UNIV, Dept Chem & Chem Biol, Cambridge, MA, USA
?HARVARD UNIV, Dept Chem & Chem Biol, Cambridge, MA, USA
***Article 2
Total Cites: 158
Article Title: DIAMOND-LIKE AMORPHOUS CARBON
Authors: Robertson, J
Journal: MATERIALS SCIENCE & ENGINEERING R-REPORTS
Volume: 37
Page: 129-281
Year: 2002
Addresses:
?UNIV CAMBRIDGE, Dept Engn, Cambridge CB2 1PZ, England
?UNIV CAMBRIDGE, Dept Engn, Cambridge CB2 1PZ, England
***Article 3
with Ho, CM
Total Cites: 153
Article Title: MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS
Authors: Ho, CM, Tai, YC
Journal: ANNUAL REVIEW OF FLUID MECHANICS
Volume: 30
Page: 579-612
Year: 1998
Addresses:
?UNIV CALIF LOS ANGELES, Dept Mech & Aerosp Engn, Los Angeles, CA, USA
?UNIV CALIF LOS ANGELES, Dept Mech & Aerosp Engn, Los Angeles, CA, USA
?CALTECH, Dept Elect Engn, Pasadena, CA, USA
***Article 4
Total Cites: 108
Article Title: ATOMIC-SCALE FRICTION MEASUREMENTS USING FRICTION FORCE MICROSCOPY .1. GENERAL-PRINCIPLES AND NEW MEASUREMENT TECHNIQUES
Authors: Ruan, JA, Bhushan, B
Journal: JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME
Volume: 116
Page: 378-388
Year: 1994
Addresses:
?OHIO STATE UNIV, DEPT MECH ENGN, COMP MICROTRIBOL & CONTAMINAT LAB, COLUMBUS, OH, USA
***Article 5
Total Cites: 99
Article Title: FERROELECTRIC THIN FILMS IN MICROELECTROMECHANICAL SYSTEMS APPLICATIONS
Authors: Polla, DL, Francis, LF
Journal: MRS BULLETIN
Volume: 21
Page: 59-65
Year: 1996
Addresses:
?UNIV MINNESOTA, DEPT ELECT ENGN, 200 UNION ST SE, MINNEAPOLIS, MN, USA
?UNIV MINNESOTA, SCH MED, MINNEAPOLIS, MN, USA
?UNIV MINNESOTA, MICROTECHNOL LAB, MINNEAPOLIS, MN, USA
?UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN, USA
***Article 6
Total Cites: 97
Article Title: RAPID PROTOTYPING OF PATTERNED FUNCTIONAL NANOSTRUCTURES
Authors: Fan, HY, Lu, YF, Stump, A, Reed, ST, Baer, T, Schunk, R, Perez-luna, V, Lopez, GP, Brinker, CJ
Journal: NATURE
Volume: 405
Page: 56-60
Year: 2000
Addresses:
?SANDIA NATL LAB, POB 5800, Albuquerque, NM, USA
?SANDIA NATL LAB, Albuquerque, NM, USA
?UNIV NEW MEXICO, Ctr Microengineered Mat, Albuquerque, NM, USA
?UNIV NEW MEXICO, Dept Chem & Nucl Engn, Albuquerque, NM, USA
***Article 7
Total Cites: 92
Article Title: QUANTUM MECHANICAL ACTUATION OF MICROELECTROMECHANICAL SYSTEMS BY THE CASIMIR FORCE
Authors: Chan, HB, Aksyuk, VA, Kleiman, RN, Bishop, DJ, Capasso, F
Journal: SCIENCE
Volume: 291
Page: 1941-1944
Year: 2001
Addresses:
?AT&T, Lucent Technol, 600 Mt Ave, Murray Hill, NJ, USA
?AT&T, Lucent Technol, Murray Hill, NJ, USA
***Article 8
of SENSORS AND ACTUATORS A-PHYSICAL
Total Cites: 92
Article Title: HIGH-ASPECT-RATIO, ULTRATHICK, NEGATIVE-TONE NEAR-UV PHOTORESIST AND ITS APPLICATIONS FOR MEMS
Authors: Lorenz, H, Despont, M, Fahrni, N, Brugger, J, Vettiger, P, Renaud, P
Journal: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 64
Page: 33-39
Year: 1998
Addresses:
?ECOLE POLYTECH FED LAUSANNE, DMT IMS, CH-1015 Lausanne, Switzerland
?ECOLE POLYTECH FED LAUSANNE, DMT IMS, CH-1015 Lausanne, Switzerland
?IBM CORP, Div Res, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland
***Article 9
Total Cites: 91
Article Title: ORGANOMETALLIC CHEMISTRY ON SILICON SURFACES: FORMATION OF FUNCTIONAL MONOLAYERS BOUND THROUGH SI-C BONDS
Authors: Buriak, JM
Journal: CHEMICAL COMMUNICATIONS
Volume:
Page: 1051-1060
Year: 1999
Addresses:
?PURDUE UNIV, Dept Chem, Brown Labs 1393, W Lafayette, IN, USA
?PURDUE UNIV, Dept Chem, Brown Labs 1393, W Lafayette, IN, USA
***Article 10
Total Cites: 91
Article Title: SURFACE ENGINEERING AND MICROTRIBOLOGY FOR MICROELECTROMECHANICAL SYSTEMS
Authors: Komvopoulos, K
Journal: WEAR
Volume: 200
Page: 305-327
Year: 1996
Addresses:
?UNIV CALIF BERKELEY, DEPT MECH ENGN, BERKELEY, CA, USA
***Article 11
Total Cites: 89
Article Title: NANOCRYSTALLINE DIAMOND FILMS
Authors: Gruen, DM
Journal: ANNUAL REVIEW OF MATERIALS SCIENCE
Volume: 29
Page: 211-259
Year: 1999
Addresses:
?ARGONNE NATL LAB, Div Chem & Mat Sci, Argonne, IL, USA
?ARGONNE NATL LAB, Div Chem & Mat Sci, Argonne, IL, USA
***Article 12
Total Cites: 85
Article Title: SU-8: A LOW-COST NEGATIVE RESIST FOR MEMS
Authors: Lorenz, H, Despont, M, Fahrni, N, Labianca, N, Renaud, P, Vettiger, P
Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 7
Page: 121-124
Year: 1997
Addresses:
?Swiss Fed Inst Technol, DMT IMS, CH-1015 LAUSANNE, SWITZERLAND
?IBM CORP, ZURICH RES LAB, CH-8803 RUSCHLIKON, SWITZERLAND
?IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY, USA
***Article 13
Total Cites: 84
Article Title: THREE-DIMENSIONAL SELF-ASSEMBLY OF MILLIMETRE-SCALE COMPONENTS
Authors: Terfort, A, Bowden, N, Whitesides, GM
Journal: NATURE
Volume: 386
Page: 162-164
Year: 1997
Addresses:
?HARVARD UNIV, DEPT CHEM & CHEM BIOL, CAMBRIDGE, MA, USA
***Article 14
Total Cites: 83
Article Title: ALKYLTRICHLOROSILANE-BASED SELF-ASSEMBLED MONOLAYER FILMS FOR STICTION REDUCTION IN SILICON MICROMACHINES
Authors: Srinivasan, U, Houston, MR, Howe, RT, Maboudian, R
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume: 7
Page: 252-260
Year: 1998
Addresses:
?UNIV CALIF BERKELEY, Dept Chem Engn, Berkeley, CA, USA
?UNIV CALIF BERKELEY, Dept Chem Engn, Berkeley, CA, USA
?UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Berkeley, CA, USA
?UNIV CALIF BERKELEY, Dept Elect Engn & Comp Sci, Berkeley, CA, USA
***Article 15
Total Cites: 82
Article Title: M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES
Authors: Osterberg, PM, Senturia, SD
Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume: 6
Page: 107-118
Year: 1997
Addresses:
?MIT, DEPT ELECT ENGN & COMP SCI, CAMBRIDGE, MA, USA
***Article 16
Total Cites: 77
Article Title: PATTERNING LIQUID FLOW ON THE MICROSCOPIC SCALE
Authors: Kataoka, DE, Troian, SM
Journal: NATURE
Volume: 402
Page: 794-797
Year: 1999
Addresses:
?PRINCETON UNIV, Dept Chem Engn, Princeton, NJ, USA
?PRINCETON UNIV, Dept Chem Engn, Princeton, NJ, USA
***Article 17
Total Cites: 74
Article Title: RAREFACTION AND COMPRESSIBILITY EFFECTS IN GAS MICROFLOWS
Authors: Beskok, A, Karniadakis, GE, Trimmer, W
Journal: JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME
Volume: 118
Page: 448-456
Year: 1996
Addresses:
?BROWN UNIV, CTR FLUID MECH, PROVIDENCE, RI, USA
?BELLE MEAD RES INC, BELLE MEAD, NJ, USA
***Article 18
Total Cites: 74
Article Title: THE FLUID MECHANICS OF MICRODEVICES - THE FREEMAN SCHOLAR LECTURE
Authors: Gad-el-hak, M
Journal: JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME
Volume: 121
Page: 12175
Year: 1999
Addresses:
?UNIV NOTRE DAME, Dept Aerosp & Mech Engn, Notre Dame, IN, USA
?UNIV NOTRE DAME, Dept Aerosp & Mech Engn, Notre Dame, IN, USA
***Article 19
Total Cites: 73
Article Title: SCREAM-I - A SINGLE MASK, SINGLE-CRYSTAL SILICON, REACTIVE ION ETCHING PROCESS FOR MICROELECTROMECHANICAL STRUCTURES
Authors: Shaw, KA, Zhang, ZL, Macdonald, NC
Journal: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 40
Page: 63-70
Year: 1994
Addresses:
?CORNELL UNIV, SCH ELECT ENGN, ITHACA, NY, USA
?CORNELL UNIV, NATL NANOFABRICAT FACIL, ITHACA, NY, USA
***Article 20
Total Cites: 64
Article Title: SURFACE MICROMACHINING FOR MICROELECTROMECHANICAL SYSTEMS
Authors: Bustillo, JM, Howe, RT, Muller, RS
Journal: PROCEEDINGS OF THE IEEE
Volume: 86
Page: 1552-1574
Year: 1998
Addresses:
?UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Dept Elect Engn & Comp Sci, Berkeley, CA, USA
?UNIV CALIF BERKELEY, Berkeley Sensor & Actuator Ctr, Dept Elect Engn & Comp Sci, Berkeley, CA, USA
来源：Most cited papers on MEMS